Foamtec ErgoSCRUB™ Scrubbing Tool
Soft ergonomic scrubbing tool for implant tools, ceramic domes, Novellus heater blocks, and large vacuum chambers
Manufacturer: Foamtec FT901
- Rounded, ergonomically designed scrubbing tool reduces hand stress and makes cleanroom scrubbing easier
- Flexible soft handle for use on implant tools, heater blocks, vacuum chambers, and ceramic domes
- Firmer hard handle provides uniform scrubbing action on flat surfaces, minimizng tool wear
- Both accommodate a variety of diamond or silicone carbide ScrubDISK™ pads that attach with either pressure-sensitive adhesive or loop backing on reusable styles
Available as a reusable or disposable tool. Contact your Fisher Scientific™ Customer Service Representative for details about ScrubDISK options.
|Wet cleans on CVD, PECVD, PVD, Sputtering, Plasma Etch, RIE and Ion Implant Processes in Semiconductor wafer fabs; Domes|
|For cleaning critical surfaces|
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