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Foamtec ErgoSCRUB™ Scrubbing Tool

Soft ergonomic scrubbing tool for implant tools, ceramic domes, Novellus heater blocks, and large vacuum chambers

Manufacturer:  Foamtec FT901

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Catalog No. 19-120-2177

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  • Rounded, ergonomically designed scrubbing tool reduces hand stress and makes cleanroom scrubbing easier
  • Flexible soft handle for use on implant tools, heater blocks, vacuum chambers, and ceramic domes
  • Firmer hard handle provides uniform scrubbing action on flat surfaces, minimizng tool wear
  • Both accommodate a variety of diamond or silicone carbide ScrubDISK™ pads that attach with either pressure-sensitive adhesive or loop backing on reusable styles

Order Info

Available as a reusable or disposable tool. Contact your Fisher Scientific™ Customer Service Representative for details about ScrubDISK options.



Soft handle
Wet cleans on CVD, PECVD, PVD, Sputtering, Plasma Etch, RIE and Ion Implant Processes in Semiconductor wafer fabs; Domes
Loop backing
Soft handle
For cleaning critical surfaces
Product Certifications


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