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Thermo Scientific™ SURF-CAL™ Particle Size Standards

Simplify the preparation of calibration wafers with these particle size standards.

$237.00 - $1185.00

Specifications

Additive None
Composition Polystyrene
Contents Polystyrene microspheres in deionized, filtered water
Includes Certificate of Calibration and Traceability to NIST
Material Polystyrene
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Products 34
Catalog Number Mfr. No. Concentration Diameter (Metric) Price Quantity & Availability  
Catalog Number Mfr. No. Concentration Diameter (Metric) Price Quantity & Availability  
09-980-138
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Thermo Scientific™
PD047
3 x 108 particles/mL 0.047μm Each for $237.00
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09-980-139
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Thermo Scientific™
PD047B
1 x 10¹° particles/mL 0.047μm Each for $1,185.00
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09-980-140
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Thermo Scientific™
PD064
3 x 108 particles/mL 0.064μm Each for $237.00
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09-980-141
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Thermo Scientific™
PD064B
1 x 10¹° particles/mL 0.064μm Each for $1,185.00
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09-980-146
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Thermo Scientific™
PD083
3 x 108 particles/mL 0.083μm Each for $237.00
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09-980-147
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Thermo Scientific™
PD083B
1 x 10¹° particles/mL 0.083μm Each for $1,185.00
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09-980-150
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Thermo Scientific™
PD092
3 x 108 particles/mL 0.092μm Each for $237.00
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09-980-151
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Thermo Scientific™
PD092B
1 x 10¹° particles/mL 0.092μm Each for $1,185.00
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09-980-152
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Thermo Scientific™
PD100
3 x 108 particles/mL 0.100μm Each for $237.00
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09-980-153
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Thermo Scientific™
PD100B
1 x 10¹° particles/mL 0.100μm Each for $1,185.00
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09-980-178
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Thermo Scientific™
PD1100
3 x 108 particles/mL 1.112μm Each for $237.00
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09-980-179
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Thermo Scientific™
PD1100B
1 x 10¹° particles/mL 1.112μm Each for $1,185.00
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09-980-157
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Thermo Scientific™
PD125B
1 x 10¹° particles/mL 0.126μm Each for $1,185.00
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09-980-158
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Thermo Scientific™
PD155
3 x 108 particles/mL 0.155μm Each for $237.00
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09-980-159
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Thermo Scientific™
PD155B
1 x 10¹° particles/mL 0.155μm Each for $1,185.00
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09-980-180
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Thermo Scientific™
PD1600
3 x 108 particles/mL 1.59μm Each for $237.00
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09-980-162
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Thermo Scientific™
PD200
3 x 108 particles/mL 0.202μm Each for $237.00
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09-980-181
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Thermo Scientific™
PD2000
3 x 108 particles/mL 2.01μm Each for $237.00
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09-980-163
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Thermo Scientific™
PD200B
1 x 10¹° particles/mL 0.202μm Each for $1,185.00
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09-980-164
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Thermo Scientific™
PD204
3 x 108 particles/mL 0.204μm Each for $237.00
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09-980-165
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Thermo Scientific™
PD204B
1 x 10¹° particles/mL 0.204μm Each for $1,185.00
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09-980-166
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Thermo Scientific™
PD215
3 x 108 particles/mL 0.220μm Each for $237.00
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09-980-167
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Thermo Scientific™
PD215B
1 x 10¹° particles/mL 0.220μm Each for $1,185.00
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09-980-183
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Thermo Scientific™
PD3000
3 x 108 particles/mL 0.304μm Each for $237.00
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09-980-168
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Thermo Scientific™
PD305
3 x 108 particles/mL 0.304μm Each for $237.00
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09-980-169
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Thermo Scientific™
PD305B
1 x 10¹° particles/mL 0.304μm Each for $1,185.00
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09-980-170
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Thermo Scientific™
PD365
3 x 108 particles/mL 0.360μm Each for $237.00
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09-980-171
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Thermo Scientific™
PD365B
1 x 10¹° particles/mL 0.360μm Each for $1,185.00
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09-980-172
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Thermo Scientific™
PD500
3 x 108 particles/mL 0.498μm Each for $237.00
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09-980-173
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Thermo Scientific™
PD500B
1 x 10¹° particles/mL 0.498μm Each for $1,185.00
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09-980-174
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Thermo Scientific™
PD800
3 x 108 particles/mL 0.809μm Each for $237.00
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09-980-175
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Thermo Scientific™
PD800B
1 x 10¹° particles/mL 0.809μm Each for $1,185.00
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09-980-176
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Thermo Scientific™
PD802
3 x 108 particles/mL 0.802μm Each for $237.00
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09-980-177
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Thermo Scientific™
PD802B
1 x 10¹° particles/mL 0.802μm Each for $1,185.00
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Description

Description

Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.

Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.
  • Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
  • By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
  • You can also assess the performance of your SSIS at critical stages in the manufacturing process.
  • All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 x 108 particles per mL.

Note:

Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.

Specifications

Specifications

None
Polystyrene microspheres in deionized, filtered water
Polystyrene
50mL
Product stable for a minimum of 12 months
Polystyrene
Certificate of Calibration and Traceability to NIST
1.05g/cm³
1.59 at 589nm (25°C)
Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.
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