SPM calibration specimens are produced by holographic fabrication that assures high accuracy and precision. The standards provide easier testing of your SPM, improved accuracy of critical dimension measurements and accuracy of 0.5% (1 std. dev.). The pattern height of greater than 100nm provides excellent image contrast. There is uniform coverage of entire chip which allows for imaging anywhere on the chip. AFM, SEM, product: 750-HD, pattern: array of flat bumps, nominal pitch: 750 (x), Z (100), material: Ni.
Mount: Unmounted