Electron Microscopy Sciences High Resolution Magnification Calibration 150-2D For AFM

Supplier:  Electron Microscopy Sciences 801252DAFM

Model 150-2D is a very high resolution reference and traceable standards for magnification calibration of AFM, SEM, Auger, and FIB. It has a precision, holographic pattern that provides accurate calibration in the horizontal plane for very high resolution, nanometer-scale measurements.

The period is 144 nm pitch, two-dimensional array that is accurate to +/- 1 nm (calibration certificate will have actual pitch.) Surface: Aluminum bumps on Silicon, 4x3 mm die. Bump height (about 90 nm) and width (about 75 nm) are not calibrated.

For SEM an independent analytical lab has tested this specimen in a FE-SEM and found that the pattern was very uniform and the specimen was easy to image. No significant charging was observed in the voltage range 1-20 kV. Comes with a non-traceable, manufacturer's certificate.

Catalog No. 50-190-1664