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Kurt J Lesker Company FOMBLIN Y 16/6, 1KG
SDP

Supplier:  Kurt J Lesker Company MFY16/6BB

Encompass

Solvay Specialty Polymers Fomblin Inert PFPE Fluid. Doesn't react with most corrosive vapors or act as a fuel when pumping oxygen or oxidizing agents. Withstands high temperatures and oxygen conditions (photo-resist stripping), processes forming Lewis acids (aluminum etching), products from sulfur hexafluoride etching, most acids, bases, and oxidizing agents. Applications include extreme operating conditions, pumping oxygen or other oxidants, photo-resist stripping, LPCVD, plasma etching, and reactive ion etching. Choose Fomblin� by viscosity-use the fluid closest to the pump manufacturer's recommendation for normal fluids. Recommended for direct and belt-driven rotary vane pumps used in extreme operating conditions found in semiconductor processing. Thermally highly stable. Thermal decomposition will only occur at temperatures over 290�C (554�F). Extensively wide temperature range: -100 �C - 290 �C. Weight loss as low as 0.3% at 204 �C.

Catalog No. NC0261042


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