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Electron Microscopy Sciences MAG*I*CAL Calibration Sample
Supplier: Electron Microscopy Sciences 80069
World's smallest ruler. Performs all major TEM calibrations including all magnification ranges, camera constant, image diffraction pattern rotation, and directly traceable to a natural constant.
MAG*I*CAL consists of ion milled cross section of a silicon single crystal consisting of a series of atomically flat layers of Si and SiGe, which have been grown epitaxially by MBE (molecular beam epitaxy). When the calibration structure is viewed in a TEM, it appears as a series of light and dark layers where the layer thicknesses are accurately known. The calibrated thickness measurements of these light (silicon) and dark (SiGe) layers are based on careful TEM measurements of the <111> lattice spacing of silicon, which is visible on the calibration sample itself, and are supported by x-ray diffraction measurements. The layer spacing are designed so that the sample can be used to calibrate the entire magnification range in a TEM, from 1,000X to 1,000,000X.
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