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Sputtering Targets

Sputtering targets are specialized materials employed for thin-film deposition in various industries, including electronics, energy, and textiles. These targets can be composed of different elemental or alloy compositions, such as pure metals or ceramics, and are bombarded by ions, causing atoms or molecules to be ejected from their surface. These particles then deposit on a substrate to create a thin, uniform film. Different types of sputtering targets exist, including planar or rotary targets and a range of materials, such as gold, silver, titanium, and tungsten. Their selection depends on different factors like the application requirements, material properties, and compatibility with the sputtering system.
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1 – 15 of 71 results
1

Aluminum sputtering target, 50.8mm (2.0 in.) dia. x 3.18mm (0.125 in.) thick, 99.999% (metals basis), Thermo Scientific Chemicals

CAS: 7429-90-5 Molecular Formula: Al Molecular Weight (g/mol): 26.98 MDL Number: MFCD00134029 InChI Key: XAGFODPZIPBFFR-UHFFFAOYSA-N Synonym: aluminum,metal,powder,aluminio,metana,adom,alumina fibre,aluminum flake,dust,noral aluminum PubChem CID: 5359268 ChEBI: CHEBI:33629 IUPAC Name: aluminum SMILES: [Al]

PubChem CID 5359268
CAS 7429-90-5
Molecular Weight (g/mol) 26.98
ChEBI CHEBI:33629
MDL Number MFCD00134029
SMILES [Al]
Synonym aluminum,metal,powder,aluminio,metana,adom,alumina fibre,aluminum flake,dust,noral aluminum
IUPAC Name aluminum
InChI Key XAGFODPZIPBFFR-UHFFFAOYSA-N
Molecular Formula Al
2

Aluminum sputtering target, 76.2mm (3.0 in.) dia. x 3.18mm (0.125 in.) thick, 99.999% (metals basis), Thermo Scientific Chemicals

CAS: 7429-90-5 Molecular Formula: Al Molecular Weight (g/mol): 26.98 MDL Number: MFCD00134029 InChI Key: XAGFODPZIPBFFR-UHFFFAOYSA-N Synonym: aluminum,metal,powder,aluminio,metana,adom,alumina fibre,aluminum flake,dust,noral aluminum PubChem CID: 5359268 ChEBI: CHEBI:33629 IUPAC Name: aluminum SMILES: [Al]

PubChem CID 5359268
CAS 7429-90-5
Molecular Weight (g/mol) 26.98
ChEBI CHEBI:33629
MDL Number MFCD00134029
SMILES [Al]
Synonym aluminum,metal,powder,aluminio,metana,adom,alumina fibre,aluminum flake,dust,noral aluminum
IUPAC Name aluminum
InChI Key XAGFODPZIPBFFR-UHFFFAOYSA-N
Molecular Formula Al
3

Magnesium sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis), Thermo Scientific Chemicals

CAS: 7439-95-4 Molecular Formula: Mg Molecular Weight (g/mol): 24.30 MDL Number: MFCD00085308 InChI Key: JLVVSXFLKOJNIY-UHFFFAOYSA-N Synonym: magnesio,sheet,powdered,magnesio italian,turnings,rieke's active,ribbon,unii-i38zp9992a,hsdb 654,nitrate, acs PubChem CID: 5462224 ChEBI: CHEBI:25107 IUPAC Name: magnesium SMILES: [Mg]

PubChem CID 5462224
CAS 7439-95-4
Molecular Weight (g/mol) 24.30
ChEBI CHEBI:25107
MDL Number MFCD00085308
SMILES [Mg]
Synonym magnesio,sheet,powdered,magnesio italian,turnings,rieke's active,ribbon,unii-i38zp9992a,hsdb 654,nitrate, acs
IUPAC Name magnesium
InChI Key JLVVSXFLKOJNIY-UHFFFAOYSA-N
Molecular Formula Mg
5

Titanium sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.995% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti
6

Titanium sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.995% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti
9

Silicon(II) oxide sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.9% (metals basis)

CAS: 10097-28-6 Molecular Formula: OSi Molecular Weight (g/mol): 44.084 MDL Number: MFCD00151536 InChI Key: LIVNPJMFVYWSIS-UHFFFAOYSA-N Synonym: silicon monoxide,silylene, oxo,silicon ii oxide,unii-1oqn9cbg7l,1oqn9cbg7l,silicon ii oxide, optical grade,sio,oxidosilicon,oxosilanylidene,oxosilylene PubChem CID: 66241 ChEBI: CHEBI:30588 IUPAC Name: oxoniumylidynesilanide SMILES: [O+]#[Si-]

PubChem CID 66241
CAS 10097-28-6
Molecular Weight (g/mol) 44.084
ChEBI CHEBI:30588
MDL Number MFCD00151536
SMILES [O+]#[Si-]
Synonym silicon monoxide,silylene, oxo,silicon ii oxide,unii-1oqn9cbg7l,1oqn9cbg7l,silicon ii oxide, optical grade,sio,oxidosilicon,oxosilanylidene,oxosilylene
IUPAC Name oxoniumylidynesilanide
InChI Key LIVNPJMFVYWSIS-UHFFFAOYSA-N
Molecular Formula OSi
10

Titanium nitride sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.5% (metals basis)

CAS: 25583-20-4 Molecular Formula: NTi Molecular Weight (g/mol): 61.87 MDL Number: MFCD00049596 InChI Key: NRTOMJZYCJJWKI-UHFFFAOYSA-N Synonym: titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a PubChem CID: 93091 IUPAC Name: azanylidynetitanium SMILES: N#[Ti]

PubChem CID 93091
CAS 25583-20-4
Molecular Weight (g/mol) 61.87
MDL Number MFCD00049596
SMILES N#[Ti]
Synonym titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a
IUPAC Name azanylidynetitanium
InChI Key NRTOMJZYCJJWKI-UHFFFAOYSA-N
Molecular Formula NTi
14

Copper sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.999% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
15

Tin sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.995% (metals basis)

CAS: 7440-31-5 Molecular Formula: Sn Molecular Weight (g/mol): 118.71 MDL Number: MFCD00133862 InChI Key: ATJFFYVFTNAWJD-UHFFFAOYSA-N Synonym: powder,stannum,metallic,tin, elemental,wang,zinn,flake,tin, metal,silver matt powder,zinn german PubChem CID: 5352426 ChEBI: CHEBI:32990 IUPAC Name: tin SMILES: [Sn]

PubChem CID 5352426
CAS 7440-31-5
Molecular Weight (g/mol) 118.71
ChEBI CHEBI:32990
MDL Number MFCD00133862
SMILES [Sn]
Synonym powder,stannum,metallic,tin, elemental,wang,zinn,flake,tin, metal,silver matt powder,zinn german
IUPAC Name tin
InChI Key ATJFFYVFTNAWJD-UHFFFAOYSA-N
Molecular Formula Sn