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Sputtering Targets

Sputtering targets are specialized materials employed for thin-film deposition in various industries, including electronics, energy, and textiles. These targets can be composed of different elemental or alloy compositions, such as pure metals or ceramics, and are bombarded by ions, causing atoms or molecules to be ejected from their surface. These particles then deposit on a substrate to create a thin, uniform film. Different types of sputtering targets exist, including planar or rotary targets and a range of materials, such as gold, silver, titanium, and tungsten. Their selection depends on different factors like the application requirements, material properties, and compatibility with the sputtering system.
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1 – 15 of 230 results
1

Thermo Scientific Chemicals Titanium sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.995% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti
2

Thermo Scientific Chemicals Aluminum sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.999% (metals basis)

CAS: 7429-90-5 Molecular Formula: Al Molecular Weight (g/mol): 26.98 MDL Number: MFCD00134029 InChI Key: XAGFODPZIPBFFR-UHFFFAOYSA-N Synonym: aluminum,metal,powder,aluminio,metana,adom,alumina fibre,aluminum flake,dust,noral aluminum PubChem CID: 5359268 ChEBI: CHEBI:33629 IUPAC Name: aluminum SMILES: [Al]

PubChem CID 5359268
CAS 7429-90-5
Molecular Weight (g/mol) 26.98
ChEBI CHEBI:33629
MDL Number MFCD00134029
SMILES [Al]
Synonym aluminum,metal,powder,aluminio,metana,adom,alumina fibre,aluminum flake,dust,noral aluminum
IUPAC Name aluminum
InChI Key XAGFODPZIPBFFR-UHFFFAOYSA-N
Molecular Formula Al
3

Thermo Scientific Chemicals Silver sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-22-4 Molecular Formula: Ag Molecular Weight (g/mol): 107.87 MDL Number: MFCD00003397 InChI Key: BQCADISMDOOEFD-UHFFFAOYSA-N Synonym: argentum,metal,atom,colloidal,silver, colloidal,silver, elemental,algaedyn,amalgum,epinall,silber PubChem CID: 23954 ChEBI: CHEBI:9141 IUPAC Name: silver SMILES: [Ag]

PubChem CID 23954
CAS 7440-22-4
Molecular Weight (g/mol) 107.87
ChEBI CHEBI:9141
MDL Number MFCD00003397
SMILES [Ag]
Synonym argentum,metal,atom,colloidal,silver, colloidal,silver, elemental,algaedyn,amalgum,epinall,silber
IUPAC Name silver
InChI Key BQCADISMDOOEFD-UHFFFAOYSA-N
Molecular Formula Ag
4

Thermo Scientific Chemicals Tin sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.995% (metals basis)

CAS: 7440-31-5 Molecular Formula: Sn Molecular Weight (g/mol): 118.71 MDL Number: MFCD00133862 InChI Key: ATJFFYVFTNAWJD-UHFFFAOYSA-N Synonym: powder,stannum,metallic,tin, elemental,wang,zinn,flake,tin, metal,silver matt powder,zinn german PubChem CID: 5352426 ChEBI: CHEBI:32990 IUPAC Name: tin SMILES: [Sn]

PubChem CID 5352426
CAS 7440-31-5
Molecular Weight (g/mol) 118.71
ChEBI CHEBI:32990
MDL Number MFCD00133862
SMILES [Sn]
Synonym powder,stannum,metallic,tin, elemental,wang,zinn,flake,tin, metal,silver matt powder,zinn german
IUPAC Name tin
InChI Key ATJFFYVFTNAWJD-UHFFFAOYSA-N
Molecular Formula Sn
5

Thermo Scientific Chemicals Titanium nitride sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.5% (metals basis)

CAS: 25583-20-4 Molecular Formula: NTi Molecular Weight (g/mol): 61.87 MDL Number: MFCD00049596 InChI Key: NRTOMJZYCJJWKI-UHFFFAOYSA-N Synonym: titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a PubChem CID: 93091 IUPAC Name: azanylidynetitanium SMILES: N#[Ti]

PubChem CID 93091
CAS 25583-20-4
Molecular Weight (g/mol) 61.87
MDL Number MFCD00049596
SMILES N#[Ti]
Synonym titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a
IUPAC Name azanylidynetitanium
InChI Key NRTOMJZYCJJWKI-UHFFFAOYSA-N
Molecular Formula NTi
6

Thermo Scientific Chemicals Copper sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.995% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
7

Thermo Scientific Chemicals Cobalt sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7440-48-4 Molecular Formula: Co Molecular Weight (g/mol): 58.93 MDL Number: MFCD00010935 InChI Key: GUTLYIVDDKVIGB-UHFFFAOYSA-N Synonym: kobalt,cobalto,moncation,co1+,cobaltum,powder,cobalt, ion co1+,hydrido,atom,hydride PubChem CID: 104730 ChEBI: CHEBI:27638 IUPAC Name: cobalt SMILES: [Co]

PubChem CID 104730
CAS 7440-48-4
Molecular Weight (g/mol) 58.93
ChEBI CHEBI:27638
MDL Number MFCD00010935
SMILES [Co]
Synonym kobalt,cobalto,moncation,co1+,cobaltum,powder,cobalt, ion co1+,hydrido,atom,hydride
IUPAC Name cobalt
InChI Key GUTLYIVDDKVIGB-UHFFFAOYSA-N
Molecular Formula Co
8

Thermo Scientific Chemicals Copper sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.995% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
9

Thermo Scientific Chemicals Cobalt sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7440-48-4 Molecular Formula: Co Molecular Weight (g/mol): 58.93 MDL Number: MFCD00010935 InChI Key: GUTLYIVDDKVIGB-UHFFFAOYSA-N Synonym: kobalt,cobalto,moncation,co1+,cobaltum,powder,cobalt, ion co1+,hydrido,atom,hydride PubChem CID: 104730 ChEBI: CHEBI:27638 IUPAC Name: cobalt SMILES: [Co]

PubChem CID 104730
CAS 7440-48-4
Molecular Weight (g/mol) 58.93
ChEBI CHEBI:27638
MDL Number MFCD00010935
SMILES [Co]
Synonym kobalt,cobalto,moncation,co1+,cobaltum,powder,cobalt, ion co1+,hydrido,atom,hydride
IUPAC Name cobalt
InChI Key GUTLYIVDDKVIGB-UHFFFAOYSA-N
Molecular Formula Co
10

Thermo Scientific Chemicals Chromium sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7440-47-3 Molecular Formula: Cr Molecular Weight (g/mol): 52.00 MDL Number: MFCD00010944 InChI Key: VYZAMTAEIAYCRO-UHFFFAOYSA-N Synonym: chrom,chrome,cromo,metal,chrome french,compounds,chrom german,chromium, elemental,chromium, metal,ccris 159 PubChem CID: 23976 ChEBI: CHEBI:28073 IUPAC Name: chromium SMILES: [Cr]

PubChem CID 23976
CAS 7440-47-3
Molecular Weight (g/mol) 52.00
ChEBI CHEBI:28073
MDL Number MFCD00010944
SMILES [Cr]
Synonym chrom,chrome,cromo,metal,chrome french,compounds,chrom german,chromium, elemental,chromium, metal,ccris 159
IUPAC Name chromium
InChI Key VYZAMTAEIAYCRO-UHFFFAOYSA-N
Molecular Formula Cr
11

Thermo Scientific Chemicals Copper sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.999% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
12

Thermo Scientific Chemicals Iron sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7439-89-6 Molecular Formula: Fe Molecular Weight (g/mol): 55.85 MDL Number: MFCD00010999 InChI Key: XEEYBQQBJWHFJM-UHFFFAOYSA-N Synonym: ferrum,iron, elemental,ferrous,remko,armco,ferrovac,hoeganaes eh,3zhp,ancor b,atomiron 5m PubChem CID: 23925 ChEBI: CHEBI:82664 IUPAC Name: iron SMILES: [Fe]

PubChem CID 23925
CAS 7439-89-6
Molecular Weight (g/mol) 55.85
ChEBI CHEBI:82664
MDL Number MFCD00010999
SMILES [Fe]
Synonym ferrum,iron, elemental,ferrous,remko,armco,ferrovac,hoeganaes eh,3zhp,ancor b,atomiron 5m
IUPAC Name iron
InChI Key XEEYBQQBJWHFJM-UHFFFAOYSA-N
Molecular Formula Fe
13

Thermo Scientific Chemicals Zinc oxide sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.9% (metals basis)

CAS: 1314-13-2 Molecular Formula: OZn Molecular Weight (g/mol): 81.38 MDL Number: MFCD00011300 InChI Key: XLOMVQKBTHCTTD-UHFFFAOYSA-N Synonym: zinc oxide,zinc white,amalox,permanent white,Chinese white,snow white,emanay zinc oxide,felling zinc oxide,zinc oxide zno,akro-zinc bar 85 PubChem CID: 14806 ChEBI: CHEBI:36560 IUPAC Name: oxozinc SMILES: O=[Zn]

PubChem CID 14806
CAS 1314-13-2
Molecular Weight (g/mol) 81.38
ChEBI CHEBI:36560
MDL Number MFCD00011300
SMILES O=[Zn]
Synonym zinc oxide,zinc white,amalox,permanent white,Chinese white,snow white,emanay zinc oxide,felling zinc oxide,zinc oxide zno,akro-zinc bar 85
IUPAC Name oxozinc
InChI Key XLOMVQKBTHCTTD-UHFFFAOYSA-N
Molecular Formula OZn
14

Thermo Scientific Chemicals Zinc sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.99% (metals basis)

CAS: 7440-66-6 Molecular Formula: Zn Molecular Weight (g/mol): 65.38 MDL Number: MFCD00011291 InChI Key: HCHKCACWOHOZIP-UHFFFAOYSA-N Synonym: dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust PubChem CID: 23994 ChEBI: CHEBI:30185 IUPAC Name: zinc SMILES: [Zn]

PubChem CID 23994
CAS 7440-66-6
Molecular Weight (g/mol) 65.38
ChEBI CHEBI:30185
MDL Number MFCD00011291
SMILES [Zn]
Synonym dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust
IUPAC Name zinc
InChI Key HCHKCACWOHOZIP-UHFFFAOYSA-N
Molecular Formula Zn
15

Thermo Scientific Chemicals Molybdenum sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7439-98-7 Molecular Formula: Mo Molecular Weight (g/mol): 95.95 MDL Number: MFCD00003465 InChI Key: ZOKXTWBITQBERF-UHFFFAOYSA-N Synonym: molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2 PubChem CID: 23932 ChEBI: CHEBI:28685 IUPAC Name: molybdenum SMILES: [Mo]

PubChem CID 23932
CAS 7439-98-7
Molecular Weight (g/mol) 95.95
ChEBI CHEBI:28685
MDL Number MFCD00003465
SMILES [Mo]
Synonym molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2
IUPAC Name molybdenum
InChI Key ZOKXTWBITQBERF-UHFFFAOYSA-N
Molecular Formula Mo