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Electron Microscopy Sciences Chessy Test Specimen
Supplier: Electron Microscopy Sciences 7950301
This precise SEM calibration specimen consist of more than 1.6 million gold squares of 1 size on silicon forming a 4-fold checkerboard pattern in an area of 5 mm square. The smallest metric checkerboard has a size of 10 x 10. Such checkerboards form larger metric checkerboards of 100 x 100 - These again form checkerboards of 1 mm square. Finally, such 1mm squares are arranged in the same manner covering a field of 5 mm square.
The edges of the empty corners in 0.1 and 1 mm checkerboards are additionally marked. The surrounding frame is 10 wide and has an outer side length of 5.04 mm. The pattern was directly written by e-beam lithography using the new ZBA 31/32 from JENOPTIK.
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