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Foamtec AMAT XGEN PM Kit

Catalog No. 191202195 Shop All Foamtec International Products
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Grit:
180, 800, 1350 Grit Diamond
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Catalog No. Grit
19-120-2195 180, 800, 1350 Grit Diamond
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Catalog No. 19-120-2195 Supplier Foamtec Supplier No. HT4500XGEN4
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Description

For cleaning critical surfaces

Effectively PM the applied materials XGEN CVD Poly chamber in a timely manner while maintaining the wafer thiness, the wafer Rs non-uniformities withing specifications and improving tool performance

Specifications

For Use With (Application) For cleaning critical surfaces
Grit 180, 800, 1350 Grit Diamond
Includes Two 800 Grit Diamond ScrubPAD, 180 Grit Diamond ScrubPAD, 800 Grit Diamond ScrubTIP™, 180 Grit Diamond ScrubTIP™, 1350 Grit Diamond ScrubTIP™, UltraSOLV™ spong
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