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Foamtec AMAT XGEN PM Kit

For cleaning critical surfaces

Manufacturer:  Foamtec HT4500XGEN4

Catalog No. 19-120-2195


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Description

Description

Effectively PM the applied materials XGEN CVD Poly chamber in a timely manner while maintaining the wafer thiness, the wafer Rs non-uniformities withing specifications and improving tool performance

Specifications

Specifications

Two 800 Grit Diamond ScrubPAD, 180 Grit Diamond ScrubPAD, 800 Grit Diamond ScrubTIP™, 180 Grit Diamond ScrubTIP™, 1350 Grit Diamond ScrubTIP™, UltraSOLV™ spong
For cleaning critical surfaces
Foamtec AMAT XGEN PM kit
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