Foamtec AMAT XGEN PM Kit
For cleaning critical surfaces
Manufacturer: Foamtec HT4500XGEN4
Effectively PM the applied materials XGEN CVD Poly chamber in a timely manner while maintaining the wafer thiness, the wafer Rs non-uniformities withing specifications and improving tool performance
|For cleaning critical surfaces|
|Two 800 Grit Diamond ScrubPAD, 180 Grit Diamond ScrubPAD, 800 Grit Diamond ScrubTIP™, 180 Grit Diamond ScrubTIP™, 1350 Grit Diamond ScrubTIP™, UltraSOLV™ spong|
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