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  7. 191202195

Foamtec AMAT XGEN PM Kit

Catalog No. 191202195
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Grit:
180, 800, 1350 Grit Diamond
This item is not returnable. View return policy
This item is not returnable. View return policy

Description

For cleaning critical surfaces

Effectively PM the applied materials XGEN CVD Poly chamber in a timely manner while maintaining the wafer thiness, the wafer Rs non-uniformities withing specifications and improving tool performance

Specifications

For Use With (Application) For cleaning critical surfaces
Grit 180, 800, 1350 Grit Diamond
Includes Two 800 Grit Diamond ScrubPAD, 180 Grit Diamond ScrubPAD, 800 Grit Diamond ScrubTIP™, 180 Grit Diamond ScrubTIP™, 1350 Grit Diamond ScrubTIP™, UltraSOLV™ spong
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