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Foamtec UltraSOLV™ ScrubPADS™

Catalog No. 19304798 Shop All Foamtec International Products
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Grit:
100
140
180
220
280
360
400
600
800
1200
1350
2000
3000
4000
Includes:
Slit
Without slit
Material:
Diamond
Silicone Carbide
Dimensions (L x W):
1.5 x 2.25 in.
1.5 x 2.5 in.
1.5 x 3.25 in.
1.5 x 4.25 in.
3 x 4 in.
32 product options available for selection
Product selection table with 32 available options. Use arrow keys to navigate and Enter or Space to select.
Numéro de catalogue. Grit Includes Material Dimensions (L x W)
19-304-798 800 Without slit Diamond 1.5 x 2.5 in.
19-042-472 180 Without slit Diamond 3 x 4 in.
19-042-414 100 Slit Silicone Carbide 3 x 4 in.
19-041-777 1350 Without slit Diamond 3 x 4 in.
19-042-110 220 Without slit Silicone Carbide 3 x 4 in.
19-042-111 280 Without slit Silicone Carbide 3 x 4 in.
19-041-784 600 Slit Silicone Carbide 3 x 4 in.
19-042-113 600 Without slit Silicone Carbide 3 x 4 in.
19-042-418 400 Slit Silicone Carbide 3 x 4 in.
19-120-2282 800 Without slit Diamond 3 x 4 in.
19-120-2278 280 Without slit Diamond 3 x 4 in.
19-037-495 800 Without slit Silicone Carbide 3 x 4 in.
19-042-106 100 Without slit Silicone Carbide 3 x 4 in.
19-120-2280 360 Without slit Diamond 3 x 4 in.
19-120-2183 280 Without slit Diamond 3 x 4 in.
19-120-2190 360 Without slit Diamond 3 x 4 in.
19-120-2191 800 Without slit Diamond 3 x 4 in.
19-304-796 800 Without slit Diamond 1.5 x 4.25 in.
19-304-740 2000 Without slit Diamond 3 x 4 in.
19-304-739 140 Without slit Diamond 3 x 4 in.
19-304-742 4000 Without slit Diamond 3 x 4 in.
19-304-791 280 Without slit Diamond 1.5 x 3.25 in.
19-304-790 280 Without slit Diamond 1.5 x 4.25 in.
19-304-792 280 Without slit Diamond 1.5 x 2.5 in.
19-304-793 360 Without slit Diamond 1.5 x 4.25 in.
19-304-794 360 Without slit Diamond 1.5 x 3.25 in.
19-304-795 360 Without slit Diamond 1.5 x 2.25 in.
19-306-101 1200 Without slit Silicone Carbide 3 x 4 in.
19-042-108 180 Without slit Silicone Carbide 3 x 4 in.
19-304-738 400 Without slit Silicone Carbide 3 x 4 in.
19-304-741 3000 Without slit Diamond 3 x 4 in.
19-306-102 1200 Slit Diamond 3 x 4 in.
Use arrow keys to navigate between rows. Press Enter or Space to select a product option. 32 options available.
32 options
Numéro de catalogue. 19-304-798 Fournisseur Foamtec Code fournisseur HT4580D831
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Description

Vacuum Chamber Cleaning ScrubPADS for light to heavy duty PM procedures

Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
  • Fiber-free construction reduces particle levels in cleaned tools
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
  • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times

Spécifications

Product Type Vacuum Chamber Cleaning Scrub Pad
Dimensions (L x W) 1.5 x 2.5 in.
Dimensions (L x W x H) 1.5 x 2.25 in.
For Use With (Application) Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
For Use With (Equipment) Wafer processing tools
Grit 800
Includes Without slit
Length (English) 2.25 in.
Length (Metric) 5.72 cm
Material Diamond
Thickness (English) 0.078 in.
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