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Foamtec UltraSOLV™ ScrubPADS™

Vacuum Chamber Cleaning ScrubPADS for light to heavy duty PM procedures

$34.97 - $6180.00

Specifications

For Use With (Application) Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
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Products 33
Catalog Number Mfr. No. Grit Includes Material Length (Metric) Price Quantity & Availability  
Catalog Number Mfr. No. Grit Includes Material Length (Metric) Price Quantity & Availability  
19-042-472
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Foamtec
HT4518D10
180 Without slit Diamond 10.16cm
Pack of 10 for $860.50
Case of 10 PK for $7,180.00
Add to cart
 
19-042-108
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Foamtec
HT451810
180 Without slit Silicone Carbide 10.16cm
Pack of 10 for $105.40
Case of 50 PK for $4,110.00
Add to cart
 
19-042-414
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Foamtec
HT4510S10
100 Slit Silicone Carbide 10.16cm
Pack of 10 for $136.40
Case of 50 PK for $5,480.00
Add to cart
 
19-041-777
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Foamtec
HT4513PD10
1350 Without slit Diamond 10.16cm
Pack of 10 for $860.50
Case of 10 PK for $7,180.00
Add to cart
 
19-042-110
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Foamtec
HT452210
220 Without slit Silicone Carbide 10.16cm
Pack of 10 for $134.00
Case of 50 PK for $5,380.00
Add to cart
 
19-042-111
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Foamtec
HT452810
280 Without slit Silicone Carbide 10.16cm
Pack of 10 for $134.00
Case of 50 PK for $5,380.00
Add to cart
 
19-041-784
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Foamtec
HT4560S10
600 Slit Silicone Carbide 10.16cm
Pack of 10 for $34.97
Case of 50 PK for $5,480.00
Add to cart
 
19-042-113
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Foamtec
HT456010
600 Without slit Silicone Carbide 10.16cm
Pack of 10 for $134.00
Case of 50 PK for $5,380.00
Add to cart
 
19-042-418
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Foamtec
HT4540S10
400 Slit Silicone Carbide 10.16cm
Pack of 10 for $136.40
Case of 50 PK for $5,480.00
Add to cart
 
19-120-2282
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Foamtec
HT4580D10
800 Without slit Diamond 10.16cm
Pack of 10 for $860.50
Case of 10 PK for $7,180.00
Add to cart
 
19-120-2278
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Foamtec
HT4528D10
280 Without slit Diamond 10.16cm
Pack of 10 for $860.50
Case of 10 PK for $7,180.00
Add to cart
 
19-037-495
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Foamtec
HT458010
800 Without slit Silicone Carbide 10.16cm
Pack of 10 for $105.40
Case of 50 PK for $4,630.00
Add to cart
 
19-042-106
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Foamtec
HT451010
100 Without slit Silicone Carbide 10.16cm
Pack of 10 for $134.00
Case of 50 PK for $5,380.00
Add to cart
 
19-120-2280
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Foamtec
HT4536D10
360 Without slit Diamond 10.16cm
Pack of 10 for $546.50
Case of 10 PK for $4,390.00
Add to cart
 
19-120-2183
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Foamtec
HT4528D101
280 Without slit Diamond 10.16cm
Case of 100 for $5,590.00
Add to cart
 
19-120-2190
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Foamtec
HT4536D101
360 Without slit Diamond 10.16cm
Case of 100 for $6,180.00
Add to cart
 
19-120-2191
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Foamtec
HT4580D101
800 Without slit Diamond 10.16cm
Case of 100 for $5,590.00
Add to cart
 
19-304-796
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Foamtec
HT4580D811
800 Without slit Diamond 10.8cm
Case of 25 for $769.00
Add to cart
 
19-304-798
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Foamtec
HT4580D831
800 Without slit Diamond 5.72cm
Case of 25 for $457.50
Add to cart
 
19-304-738
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Foamtec
HT454010
400 Without slit Silicone Carbide 10.16cm
Pack of 10 for $105.40
Case of 50 PK for $4,630.00
Add to cart
 
19-304-740
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Foamtec
HT4520PD10
2000 Without slit Diamond 10.16cm
Pack of 10 for $626.50
Case of 10 PK for $5,250.00
Add to cart
 
19-304-739
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Foamtec
HT4514D10
140 Without slit Diamond 10.16cm
Pack of 10 for $754.00
Case of 10 PK for $6,300.00
Add to cart
 
19-304-741
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Foamtec
HT4530PD10
3000 Without slit Diamond 10.16cm
Pack of 10 for $650.00
Case of 10 PK for $5,530.00
Add to cart
 
19-304-742
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Foamtec
HT4540PD10
4000 Without slit Diamond 10.16cm
Pack of 10 for $234.04
Case of 10 PK for $5,530.00
Add to cart
 
19-304-791
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Foamtec
HT4528D821
280 Without slit Diamond 8.26cm
Case of 25 for $588.50
Add to cart
 
19-304-790
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Foamtec
HT4528D811
280 Without slit Diamond 10.8cm
Case of 25 for $769.00
Add to cart
 
19-304-792
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Foamtec
HT4528D831
280 Without slit Diamond 6.35cm
Case of 25 for $457.50
Add to cart
 
19-304-793
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Foamtec
HT4536D811
360 Without slit Diamond 10.8cm
Case of 25 for $769.00
Add to cart
 
19-304-794
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Foamtec
HT4536D821
360 Without slit Diamond 8.26cm
Case of 25 for $588.50
Add to cart
 
19-304-795
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Foamtec
HT4536D831
360 Without slit Diamond 5.72cm
Case of 25 for $457.50
Add to cart
 
19-306-100
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Foamtec
HT4522D10
220 Without slit Diamond 10.16cm
Pack of 10 for $860.50
Case of 10 PK for $7,180.00
Add to cart
 
19-306-101
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Foamtec
HT4512P10
1200 Without slit Silicon Carbide 10.16cm
Pack of 50 for $323.00
Case of 10 PK for $2,920.00
Add to cart
 
19-306-102
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Foamtec
HT4512PS10
1200 Slit Diamond 10.16cm
Case of 500 for $3,220.00
Add to cart
 
Description

Description

Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
  • Fiber-free construction reduces particle levels in cleaned tools
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
  • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times

Specifications

Specifications

Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
SDS
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