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Nilfisk™ Stainless Steel Vapor Vacuum

Capture toxic semiconductor gases and ultrafine particulate. The Nilfisk SS Vapor Vacuum features an impregnated carbon filter cartridge that captures and retains such toxic gases as arsine, phosphine and chlorinated solvent vapors (carbon tetrachloride and chloroform) released during the cleaning of semiconductor process equipment such as molecular beam epitaxy (MBE) chambers, ion implanters and plasma etching machines.

Manufacturer:  Nilfisk™ M90050

Catalog No. 19-200-105


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Includes: Disposable paper bags (5/Pk.), specially impregnated carbon filter, positive twist safety latches, heavy-duty trolley assembly, container plug w/lanyard, wand end cap and microfilter

Description

Description

  • 316 stainless steel container ensures easy decontamination
  • Heavy-duty trolley and locking wheels provide stability and safety
  • Positive twist safety latches offer added security and discourage unauthorized disassembly of the cleaner
  • Pre-HEPA filter prevents harmful particulate from damaging carbon filter
  • Standard downstream HEPA exhaust filter maintains absolute cleanroom standards by retaining particles generated by the motor
  • Activated carbon filter absorbs toxic gases, preventing their escape through the vacuum’s exhaust
  • Removable carbon filter cartridge reduces and provides easy disposal of waste
  • Ten foot flexible plastic hose allows access through small ports of machinery
Specifications

Specifications

Disposable paper bags (5/Pk.), specially impregnated carbon filter, positive twist safety latches, heavy-duty trolley assembly, container plug w/lanyard, wand end cap and microfilter
10/5A
Carbon filter
38.5 in.
22 in.
61dBA
55.8cm
29.5kg
3.25 gal.
45 cfm
Stainless steel vapor vacuum cleaner
97.8cm
55.8cm
Stainless steel
1100w
65 lb.
22 in.
12.3L
SDS
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