Nilfisk™ Stainless Steel Vapor Vacuum

Capture toxic semiconductor gases and ultrafine particulate. The Nilfisk SS Vapor Vacuum features an impregnated carbon filter cartridge that captures and retains such toxic gases as arsine, phosphine and chlorinated solvent vapors (carbon tetrachloride and chloroform) released during the cleaning of semiconductor process equipment such as molecular beam epitaxy (MBE) chambers, ion implanters and plasma etching machines.

Manufacturer:  Nilfisk™ M90050

Catalog No. 19-200-105

Includes: Disposable paper bags (5/Pk.), specially impregnated carbon filter, positive twist safety latches, heavy-duty trolley assembly, container plug w/lanyard, wand end cap and microfilter

Description

• 316 stainless steel container ensures easy decontamination
• Heavy-duty trolley and locking wheels provide stability and safety
• Positive twist safety latches offer added security and discourage unauthorized disassembly of the cleaner
• Pre-HEPA filter prevents harmful particulate from damaging carbon filter
• Standard downstream HEPA exhaust filter maintains absolute cleanroom standards by retaining particles generated by the motor
• Activated carbon filter absorbs toxic gases, preventing their escape through the vacuum’s exhaust
• Removable carbon filter cartridge reduces and provides easy disposal of waste
• Ten foot flexible plastic hose allows access through small ports of machinery

Specifications

• Includes: Disposable paper bags (5/Pk.), specially impregnated carbon filter, positive twist safety latches, heavy-duty trolley assembly, container plug w/lanyard, wand end cap and microfilter
• Amperage: 10/5A
• Filter Type: Carbon filter
• Height (English): 38.5 in.
• Length (English): 22 in.
• Noise Level: 61dBA
• Width (Metric): 55.8cm
• Weight (Metric): 29.5kg
• Capacity (English) Tank: 3.25 gal.

• Airflow Rate: 45 cfm
• Product Type: Stainless steel vapor vacuum cleaner
• Height (Metric): 97.8cm
• Length (Metric): 55.8cm
• Material: Stainless steel
• Wattage: 1100w
• Weight (English): 65 lb.
• Width (English): 22 in.
• Capacity (Metric) Tank: 12.3L