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Sigma Aldrich Fine Chemicals Biosciences PlasmaFlo gas flow mixer a1EA
Supplier: Sigma Aldrich Fine Chemicals Biosciences Z5617031EA
Use with the Expanded or Basic Plasma Cleaner for fine control of up to 2 process gases process gas mixing and monitoring of chamber pressure.Dual gas inputsFlowmeter 1 49 mL/min maximum flowrate *Flowmeter 2 104 mL/min maximum flowrate */-2% accuracyThermocouple vacuum gauge and digital meter (1 to 1999 mTorr)Input/Output connection 1/4 in. Swagelok to 1/4 in. O.D. stainless steel hose adapter* Maximum flowrate varies with process gas and regulated pressure. Correlated flowrate tables are available for the most common process gases (Air Ar N2 O2) used with our Plasma Cleaners and metered at 10 psig. Flowrate tables for other process gases and regulated pressures can be made available.
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