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Foamtec International ScrubDISKS™ 220 Diamond Grit with Loop Back

Catalog No. 19084161 Shop All Foamtec International Products
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Catalog No. 19-084-161 Supplier Foamtec International Supplier No. HT4522DC31
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Vacuum Chamber ScrubDISKS™ are a scrubbing tools for use in PM procedures on process equipment in Wafer Fab, flat panel display, optical component and hard disk drive industries.

  • Widely used in 200 mm and 300 mm fabs for PM or wet cleaning CVD, PECVD, dry etch, PVD, and ion implant tools
  • Processed to be extremely low in metals and mobile ions
  • Available in a variety of diamond and silicon carbide abrasives to support safe and efficient wet-clean BKMs
  • When used with UltraSOLV® Sponges, Wipers, and Swabs, they help reduce cleaning times, pump-down times, and contamination levels in critical process tools
  • Designed for use with ErgoSCRUB™ handles

Specifications

Product Type Scrubbing Tool
Bristle Material Not Applicable
Bristle Type None
Color-coded No
Form Disc
Handle Material Not Applicable
Handle Type None
Tip Type None
Scent Unscented
Sterility Non-sterile
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