Titanium silicide, 99.5% (metals basis)

Description

CAS: 12067-57-1 | Si3Ti5 | 323.59 g/mol

It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.

This Thermo Scientific Chemicals brand product was originally part of the Alfa Aesar product portfolio. Some documentation and label information may refer to the legacy brand. The original Alfa Aesar product / item code or SKU reference has not changed as a part of the brand transition to Thermo Scientific Chemicals.

Specifications

Chemical Identifiers

• CAS: 12067-57-1
• Molecular Formula: Si3Ti5
• Molecular Weight (g/mol): 323.59
• MDL Number: MFCD01310208
• InChI Key: GNKTZDSRQHMHLZ-UHFFFAOYSA-N
• Synonym: silicon; titanium, titanium silicide ti5si3, pentatitanium trisilicide, titanium silicide,-325 mesh
• PubChem CID: 6336553
• IUPAC Name: silicon;titanium
• SMILES: [Si].[Si].[Si].[Ti].[Ti].[Ti].[Ti].[Ti]

• Melting Point: 2130°C
• Physical Form: Powder
• Quantity: 250 g
• Assay Percent Range: 99.5%, metal basis
• Solubility Information: Soluble in hydrofluoric acid. Insoluble in water.
• Formula Weight: 323.76
• Chemical Name or Material: Titanium Silicide

Safety and Handling

Hazard Category	H228-H315-H319-H335
Hazard Statement	In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. Wear suitable gloves. This material and/or its container must be disposed of as hazardous waste.
Precautionary Statement	P210-P240-P241-P261-P264b-P271-P280-P302+P352-P304+P340-P305+P351+P338-P312-P332+P313-P362-P370+P378q-P501c
DOTInformation	DOT Class: 4.1; Packaging Group: III
EINECSNumber	235-082-9
TSCA	Yes
Recommended Storage	Ambient temperatures

SDS

RUO – Research Use Only