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  7. Foamtec UltraSOLV™ ScrubPADS™

Foamtec UltraSOLV™ ScrubPADS™

Catalog No. 191202183
Click to view available options
Grit:
100
140
180
220
280
360
400
600
800
1200
1350
2000
3000
4000
Includes:
Slit
Without slit
Material:
Diamond
Silicone Carbide
Length (Metric):
5.72 cm
6.35 cm
8.26 cm
10.16 cm
10.8 cm
This item is not returnable. View return policy
This item is not returnable. View return policy

Description

Vacuum Chamber Cleaning ScrubPADS for light to heavy duty PM procedures

Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
  • Fiber-free construction reduces particle levels in cleaned tools
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
  • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times

Specifications

Product Type Vacuum Chamber Cleaning Scrub Pad
Dimensions (L x W x H) 3 x 4 in.
For Use With (Application) Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
For Use With (Equipment) Wafer processing tools
Grit 280
Includes Without slit
Length (English) 4 in.
Length (Metric) 10.16 cm
Material Diamond
Thickness (English) 0.078 in.
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