Foamtec UltraSOLV™ ScrubPADS™

Vacuum Chamber Cleaning ScrubPADS with 180-1350 Diamond grit abrasive particles for light to heavy duty PM procedures

Manufacturer:  Foamtec HT4528D101

Catalog No. 19-120-2183

Description

Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

• Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
• Fiber-free construction reduces particle levels in cleaned tools
• Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
• Enables the elimination of H₂O₂ from PMs, which greatly reduces recovery times

Specifications

• Construction: Fiber-free
• Thickness (English): 0.078 in.
• For Use With (Application): Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
• Length (Metric): 10.16cm
• Dimensions (L x W): 3 x 4 in.
• Includes: Without slit

• For Use With (Equipment): Wafer processing tools
• Type: Vacuum chAmber cleaning scrub pad
• Length (English): 4 in.
• Material: Diamond
• Grit: 280