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  7. Foamtec UltraSOLV™ ScrubPADS™

Foamtec UltraSOLV™ ScrubPADS™

Catalog No. 191202278 Shop All Foamtec International Products
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Grit:
100
140
180
220
280
360
400
600
800
1200
1350
2000
3000
4000
Includes:
Slit
Without slit
Material:
Diamond
Silicone Carbide
Length (Metric):
5.72 cm
6.35 cm
8.26 cm
10.16 cm
10.8 cm
33 product options available for selection
Product selection table with 33 available options. Use arrow keys to navigate and Enter or Space to select.
Catalog No. Grit Includes Material Length (Metric)
19-120-2278 280 Without slit Diamond 10.16 cm
19-042-472 180 Without slit Diamond 10.16 cm
19-042-414 100 Slit Silicone Carbide 10.16 cm
19-041-777 1350 Without slit Diamond 10.16 cm
19-042-110 220 Without slit Silicone Carbide 10.16 cm
19-042-111 280 Without slit Silicone Carbide 10.16 cm
19-041-784 600 Slit Silicone Carbide 10.16 cm
19-042-113 600 Without slit Silicone Carbide 10.16 cm
19-042-418 400 Slit Silicone Carbide 10.16 cm
19-120-2282 800 Without slit Diamond 10.16 cm
19-037-495 800 Without slit Silicone Carbide 10.16 cm
19-042-106 100 Without slit Silicone Carbide 10.16 cm
19-120-2280 360 Without slit Diamond 10.16 cm
19-120-2183 280 Without slit Diamond 10.16 cm
19-120-2190 360 Without slit Diamond 10.16 cm
19-120-2191 800 Without slit Diamond 10.16 cm
19-304-796 800 Without slit Diamond 10.8 cm
19-304-798 800 Without slit Diamond 5.72 cm
19-304-740 2000 Without slit Diamond 10.16 cm
19-304-739 140 Without slit Diamond 10.16 cm
19-304-742 4000 Without slit Diamond 10.16 cm
19-304-791 280 Without slit Diamond 8.26 cm
19-304-790 280 Without slit Diamond 10.8 cm
19-304-792 280 Without slit Diamond 6.35 cm
19-304-793 360 Without slit Diamond 10.8 cm
19-304-794 360 Without slit Diamond 8.26 cm
19-304-795 360 Without slit Diamond 5.72 cm
19-306-101 1200 Without slit Silicone Carbide 10.16 cm
19-042-108 180 Without slit Silicone Carbide 10.16 cm
19-304-738 400 Without slit Silicone Carbide 10.16 cm
19-304-741 3000 Without slit Diamond 10.16 cm
19-306-100 220 Without slit Diamond 10.16 cm
19-306-102 1200 Slit Diamond 10.16 cm
Use arrow keys to navigate between rows. Press Enter or Space to select a product option. 33 options available.
33 options
Catalog No. 19-120-2278 Supplier Foamtec Supplier No. HT4528D10
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Description

Vacuum Chamber Cleaning ScrubPADS for light to heavy duty PM procedures

Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
  • Fiber-free construction reduces particle levels in cleaned tools
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
  • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times

Specifications

For Use With (Application) Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
Grit 280
Includes Without slit
Length (Metric) 10.16 cm
Material Diamond
Product Title
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