Promotional price valid on web orders only. Your contract pricing may differ. Interested in signing up for a dedicated account number?
Learn More

Foamtec UltraSOLV™ ScrubPADS™ Get IT Item

Vacuum Chamber Cleaning ScrubPADS with 180-1350 Diamond grit abrasive particles for light to heavy duty PM procedures

Manufacturer:  Foamtec HT4528D10

 View more versions of this product

Catalog No. 19-120-2278



Add to cart

Description

Description

Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
  • Fiber-free construction reduces particle levels in cleaned tools
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
  • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times

Specifications

Specifications

Fiber-free
0.078 in.
Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
10.16cm
3 x 4 in.
Without slit
Wafer processing tools
Vacuum chAmber cleaning scrub pad
4 in.
Diamond
280
Documents
Provide Content Correction

We continue to work to improve your shopping experience and your feedback regarding this content is very important to us. Please use the form below to provide feedback related to the content on this product.

Product Title

By clicking Submit, you acknowledge that you may be contacted by Fisher Scientific in regards to the feedback you have provided in this form. We will not share your information for any other purposes. All contact information provided shall also be maintained in accordance with our Privacy Policy.

Cancel Submit