Thermo Scientific™ SURF-CAL™ Particle Size Standards

Description

Simplify the preparation of calibration wafers with these particle size standards.

Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.

Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.

• Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
• By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
• You can also assess the performance of your SSIS at critical stages in the manufacturing process.
• All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 10⁸ particles per mL.

Note:

Products PD1100 and smaller are also available at 10¹⁰ particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.

Specifications

• Additive: None
• Concentration: 3 x 10⁸ particles/mL
• Content And Storage: Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.
• Contents: Polystyrene microspheres in deionized, filtered water
• Description: Particles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
• Color: White or Colorless
• For Use With (Application): SSIS Calibration and Maintenance
• Material: Polystyrene
• Product Type: Size Standard Particles
• Includes: Certificate of Calibration and Traceability to NIST
• Particle Density: 1.05g/cm³
• Quantity: 50 mL
• Refractive Index: 1.59 at 589nm (25°C)
• Size Distribution: 0.004µm
• Stability: Product stable for a minimum of 12 months
• Diameter (Metric): 0.047 μm