Thermo Scientific™ SURF-CAL™ Particle Size Standards

Catalog No.	Diameter (Metric)	Concentration
09-980-174	0.809 μm	3 x 10^8 particles/mL
09-980-138	0.047 μm	3 x 10^8 particles/mL
09-980-139	0.047 μm	1 x 10¹° particles/mL
09-980-140	0.064 μm	3 x 10^8 particles/mL
09-980-141	0.064 μm	1 x 10¹° particles/mL
09-980-146	0.083 μm	3 x 10^8 particles/mL
09-980-147	0.083 μm	1 x 10¹° particles/mL
09-980-150	0.092 μm	3 x 10^8 particles/mL
09-980-151	0.092 μm	1 x 10¹° particles/mL
09-980-152	0.100 μm	3 x 10^8 particles/mL
09-980-153	0.100 μm	1 x 10¹° particles/mL
09-980-178	1.112 μm	3 x 10^8 particles/mL
09-980-179	1.112 μm	1 x 10¹° particles/mL
09-980-157	0.126 μm	1 x 10¹° particles/mL
09-980-158	0.155 μm	3 x 10^8 particles/mL
09-980-159	0.155 μm	1 x 10¹° particles/mL
09-980-180	1.59 μm	3 x 10^8 particles/mL
09-980-162	0.202 μm	3 x 10^8 particles/mL
09-980-181	2.01 μm	3 x 10^8 particles/mL
09-980-163	0.202 μm	1 x 10¹° particles/mL
09-980-164	0.204 μm	3 x 10^8 particles/mL
09-980-165	0.204 μm	1 x 10¹° particles/mL
09-980-166	0.220 μm	3 x 10^8 particles/mL
09-980-167	0.220 μm	1 x 10¹° particles/mL
09-980-183	3.04 μm	3 x 10^8 particles/mL
09-980-168	0.304 μm	3 x 10^8 particles/mL
09-980-169	0.304 μm	1 x 10¹° particles/mL
09-980-170	0.360 μm	3 x 10^8 particles/mL
09-980-171	0.360 μm	1 x 10¹° particles/mL
09-980-172	0.498 μm	3 x 10^8 particles/mL
09-980-173	0.498 μm	1 x 10¹° particles/mL
09-980-175	0.809 μm	1 x 10¹° particles/mL
09-980-176	0.802 μm	3 x 10^8 particles/mL
09-980-177	0.802 μm	1 x 10¹° particles/mL

Catalog No. 09-980-174 Supplier Thermo Scientific™ Supplier No. PD800

Description

Simplify the preparation of calibration wafers with these particle size standards.

Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.

Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.

• Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
• By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
• You can also assess the performance of your SSIS at critical stages in the manufacturing process.
• All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 10⁸ particles per mL.

Note:

Products PD1100 and smaller are also available at 10¹⁰ particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.

Specifications

• Additive: None
• Concentration: 3 x 10⁸ particles/mL
• Content And Storage: Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.
• Contents: Polystyrene microspheres in deionized, filtered water
• Description: Particles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
• Color: White or Colorless
• For Use With (Application): SSIS Calibration and Maintenance
• Material: Polystyrene
• Product Type: Size Standard Particles
• Includes: Certificate of Calibration and Traceability to NIST
• Particle Density: 1.05g/cm³
• Quantity: 50 mL
• Refractive Index: 1.59 at 589nm (25°C)
• Size Distribution: 0.006µm
• Stability: Product stable for a minimum of 12 months
• Diameter (Metric): 0.809 μm