Foamtec UltraSOLV™ ScrubPADS™

Vacuum Chamber Cleaning ScrubPADS with 180-1350 Diamond grit abrasive particles for light to heavy duty PM procedures

Manufacturer: Foamtec HT458010

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Catalog No. 19-037-495

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    Type Vacuum chAmber cleaning scrub pad
    For Use With (Application) Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
    Length (English) 4 in.
    Length (Metric) 10.16cm
    Material Silicone Carbide
    Grit 800
    Includes Without slit
    Construction Fiber-free
    For Use With (Equipment) Wafer processing tools

    Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

    • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
    • Fiber-free construction reduces particle levels in cleaned tools
    • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
    • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times

  • Description & Specifications

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