Linear Formula: (CH3)3SiNHSi(CH3)3, Molecular Weight: 161.39, Synonym: 1,1,1,3,3,3-Hexamethyldisilazane, HMDS, BP: 125 °C(lit.). Hexamethyldisilazane (HDMS) is an organoslicon compound.HDMS is a colorless liquid used as a reagent and precursor in organic synthesis and organometallic chemistry.