Germanium is an ideal calibration standard for x-ray energy dispersive spectroscopy in electron microscopes since it is not typically found in TEM columns it cannot be mistaken for instrument components and their signal peaks. For TEM the Ge is suspended across two micron pores that are patterned on a grid of 20 nm thick silicon nitride. The single 500 x 500 micron window is compatible with high tilt angle tomography, since at 70 degrees of tilt, the thin and beveled 100 micron silicon frame allows you to use a ~50x50 micron region within the center of the window from any rotational orientation.
The specimen can be used for detector energy axis and energy resolution calibration, detector window transmission evaluation, detector solid angle measurements, electron optical instrument system peak measurements, and specimen holder penumbra measurements.